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A method for automatic correction of drift-distorted SPM images

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Abstract

A method for automatic correction of drift-distorted surface images obtained using a scanning probe microscope is developed. For the case of slowly varying drifts, simple linear transformations describing the observed distortions are constructed. One or two pairs of counter-scanned images (CSIs) are used as initial data. A system of linear equations is solved by finding the coordinate of the same surface feature in each CSI. The solutions obtained, i.e., linear transformation coefficients, are used to correct drift-induced distortions in horizontal and vertical planes. Two nonlinear drift correction methods are proposed, which provide a better accuracy in comparison with the linear correction method. The developed method can be used in feature-oriented scanning of the surface.

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Authors and Affiliations

  1. Lukin State Research Institute for Problems in Physics, Zelenograd, Moscow, 124460, Russia

    R. V. Lapshin

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  1. R. V. Lapshin
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Original Russian Text © R.V. Lapshin, 2007, published in Poverkhnost’. Rentgenovskie, Sinkhrotronnye i Neitronnye Issledovaniya, No. 11, pp. 13–20.

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Lapshin, R.V. A method for automatic correction of drift-distorted SPM images. J. Surf. Investig. 1, 630–636 (2007). https://doi.org/10.1134/S102745100706002X

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  • DOI: https://doi.org/10.1134/S102745100706002X

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