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Hybrid Nanowire Photodetector Integrated in a Silicon Photonic Crystal

  • Masato Takiguchi*
    Masato Takiguchi
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    *E-mail: [email protected]
    More by Masato Takiguchi
    Orcidhttp://orcid.org/0000-0001-6294-905X
  • , 
  • Satoshi Sasaki
    Satoshi Sasaki
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Satoshi Sasaki
  • , 
  • Kouta Tateno
    Kouta Tateno
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Kouta Tateno
    Orcidhttp://orcid.org/0000-0001-8796-2445
  • , 
  • Edward Chen
    Edward Chen
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Edward Chen
    Orcidhttp://orcid.org/0000-0001-8008-8097
  • , 
  • Kengo Nozaki
    Kengo Nozaki
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Kengo Nozaki
    Orcidhttp://orcid.org/0000-0002-0239-1880
  • , 
  • Sylvain Sergent
    Sylvain Sergent
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Sylvain Sergent
    Orcidhttp://orcid.org/0000-0001-9604-9455
  • , 
  • Eiichi. Kuramochi
    Eiichi. Kuramochi
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Eiichi. Kuramochi
    Orcidhttp://orcid.org/0000-0002-6284-823X
  • , 
  • Guoqiang Zhang
    Guoqiang Zhang
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Guoqiang Zhang
    Orcidhttp://orcid.org/0000-0003-4359-7970
  • , 
  • Akihiko Shinya
    Akihiko Shinya
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    More by Akihiko Shinya
  • , and 
  • Masaya Notomi*
    Masaya Notomi
    Nanophotonics Center, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    NTT Basic Research Laboratories, NTT Corp., 3-1, Morinosato Wakamiya, Atsugi, Kanagawa 243-0198, Japan
    *E-mail: [email protected]
    More by Masaya Notomi
    Orcidhttp://orcid.org/0000-0002-4255-4656
Cite this: ACS Photonics 2020, 7, 12, 3467–3473
Publication Date (Web):October 21, 2020
https://doi.org/10.1021/acsphotonics.0c01356
Copyright © 2020 American Chemical Society
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    Abstract

    Abstract Image

    The combination of hybrid nanowire photodetector on silicon photonic crystals has the potential to be both highly sensitive and ultrafast. A p-i-n nanowire was integrated into a silicon photonic crystal via nanomanipulation technique and has been successfully implemented as a photodiode on silicon chip with Al:ZnO transparent electrode. The hybrid nanowire photodiode can detect laser light through the Al:ZnO coated input waveguide and is capable of measuring the photonic crystal enhanced photocurrent. In addition, a measurement of the enhanced photocurrent in the light cone by the nanoantenna was also conducted. Our results reveal the prospects for future photonic on-chip processors utilizing CMOS-compatible hybrid nanowire photodetector in a photonic crystal.

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    The Supporting Information is available free of charge at https://pubs.acs.org/doi/10.1021/acsphotonics.0c01356.

    • SEM images, EDS mapping images, fabrication process flow, I–V curve of a single p-i-n nanowire, optical property of patterned Al:ZnO on PhC waveguide, and emission spectra of nanowires (PDF)

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