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Abstract

We describe a general method for producing ultrahigh-density arrays of aligned metal and semiconductor nanowires and nanowire circuits. The technique is based on translating thin film growth thickness control into planar wire arrays. Nanowires were fabricated with diameters and pitches (center-to-center distances) as small as 8 nanometers and 16 nanometers, respectively. The nanowires have high aspect ratios (up to 106), and the process can be carried out multiple times to produce simple circuits of crossed nanowires with a nanowire junction density in excess of 1011 per square centimeter. The nanowires can also be used in nanomechanical devices; a high-frequency nanomechanical resonator is demonstrated.

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Supported by the Office of Naval Research and the Defense Advanced Research Projects Agency. We thank M. Roukes and his group for teaching us how to perform high-frequency nanomechanical resonator measurements.

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Published In

Science
Volume 300 | Issue 5616
4 April 2003

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Submission history

Received: 27 December 2002
Accepted: 4 March 2003
Published in print: 4 April 2003

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Authors

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Nicholas A. Melosh
California Nanosystems Institute, University of California, Box 956905, Los Angeles, CA 90095, USA.
California Institute of Technology, Pasadena, CA 91125, USA.
Akram Boukai
California Nanosystems Institute, University of California, Box 956905, Los Angeles, CA 90095, USA.
California Institute of Technology, Pasadena, CA 91125, USA.
Frederic Diana
California Nanosystems Institute, University of California, Santa Barbara, CA 93106, USA.
Brian Gerardot
California Nanosystems Institute, University of California, Santa Barbara, CA 93106, USA.
Antonio Badolato
California Nanosystems Institute, University of California, Santa Barbara, CA 93106, USA.
Pierre M. Petroff
California Nanosystems Institute, University of California, Santa Barbara, CA 93106, USA.
James R. Heath
California Nanosystems Institute, University of California, Box 956905, Los Angeles, CA 90095, USA.
California Institute of Technology, Pasadena, CA 91125, USA.

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