Self-assembly of inorganic nanoparticles into mesoscopic or macroscopic nanoparticle assemblies is an efficient strategy to fabricate advanced devices with emergent nanoscale functionalities. Furthermore, assembly of nanoparticles onto substrates may enable the fabrication of substrate-integrated devices, akin to atomic crystal growth on a substrate. Recent progress in nanoparticle assembly suggests that ordered nanoparticle assemblies could be well produced on a selected substrate, referred to as soft epitaxial growth. Herein, recent advances in soft epitaxial growth of a nanoparticle assembly are presented, including the assembly strategies, the choice of substrate and the epitaxial modes. Perspectives are also discussed for the material design based on substrate-integrated soft epitaxial growth.