ACS Publications. Most Trusted. Most Cited. Most Read
My Activity
CONTENT TYPES

Figure 1Loading Img

Electron-Beam Lithography and Molecular Liftoff for Directed Attachment of DNA Nanostructures on Silicon: Top-down Meets Bottom-up

View Author Information
Department of Chemistry and Biochemistry, University of Notre Dame, Notre Dame, Indiana 46556, United States
Department of Chemistry and Physics, Chicago State University, Chicago, Illinois 60628, United States
Cite this: Acc. Chem. Res. 2014, 47, 6, 1759–1767
Publication Date (Web):April 9, 2014
https://doi.org/10.1021/ar500001e
Copyright © 2014 American Chemical Society

    Article Views

    1533

    Altmetric

    -

    Citations

    21
    LEARN ABOUT THESE METRICS
    Other access options

    Abstract

    Abstract Image
    Conspectus

    Our work on lithographic patterning of DNA nanostructures was inspired by a collaboration on molecular electronic devices known as quantum-dot cellular automata or QCA. QCA is a paradigm for computation in which information is transmitted and processed through the interaction of coupled electrical charges or magnetic dipoles. We began to explore the idea of molecular scale QCA and found that ab initio methods, a thermodynamic Ising model, and larger scale circuit design work suggested that circuits that did computationally interesting things could function at room temperature if made from molecular QCA cells of chemically reasonable design.

    But how could the QCA cells be patterned to form the complex arrays needed for computationally interesting circuitry, and how could those arrays of molecular circuitry be integrated with conventional electronic inputs and outputs? Top-down methods lacked the spatial resolution and high level of parallelism needed to make molecular circuits. Bottom-up chemical synthesis lacked the ability to fabricate arbitrary and heterogeneous structures tens to hundreds of nanometers in size. Chemical self-assembly at the time could produce structures in the right size scale, but was limited to homogeneous arrays. A potential solution to this conundrum was just being demonstrated in the late 1990s and early 2000s: DNA nanostructures self-assembled from oligonucleotides, whose high information density could handle the creation of arbitrary structures and chemical inhomogeneity. Our group became interested in whether DNA nanostructures could function as self-assembling circuit boards for electrical or magnetic QCA systems. This Account focuses on what we learned about the interactions of DNA nanostructures with silicon substrates and, particularly, on how electron-beam lithography could be used to direct the binding of DNA nanostructures on a variety of functional substrates.

    Read this article

    To access this article, please review the available access options below.

    Get instant access

    Purchase Access

    Read this article for 48 hours. Check out below using your ACS ID or as a guest.

    Recommended

    Access through Your Institution

    You may have access to this article through your institution.

    Your institution does not have access to this content. You can change your affiliated institution below.

    Cited By

    This article is cited by 21 publications.

    1. Sean A. Boulanger, Liangdong Zhu, Longteng Tang, Sumit Saha, Douglas A. Keszler, Chong Fang. Photoinduced Charge Transfer and Bimetallic Bond Dissociation of a Bi–W Complex in Solution. The Journal of Physical Chemistry Letters 2020, 11 (18) , 7575-7582. https://doi.org/10.1021/acs.jpclett.0c02380
    2. Mikael Madsen, Kurt V. Gothelf. Chemistries for DNA Nanotechnology. Chemical Reviews 2019, 119 (10) , 6384-6458. https://doi.org/10.1021/acs.chemrev.8b00570
    3. Na Li, Yingxu Shang, Zihong Han, Ting Wang, Zhen-Gang Wang, Baoquan Ding. Fabrication of Metal Nanostructures on DNA Templates. ACS Applied Materials & Interfaces 2019, 11 (15) , 13835-13852. https://doi.org/10.1021/acsami.8b16194
    4. Nathan R. Erickson, Cole D. Holstrom, Hannah M. Rhoda, Gregory T. Rohde, Yuriy V. Zatsikha, Pierluca Galloni, and Victor N. Nemykin . Tuning Electron-Transfer Properties in 5,10,15,20-Tetra(1′-hexanoylferrocenyl)porphyrins as Prospective Systems for Quantum Cellular Automata and Platforms for Four-Bit Information Storage. Inorganic Chemistry 2017, 56 (8) , 4716-4727. https://doi.org/10.1021/acs.inorgchem.7b00397
    5. Cheikh Tidiane Diagne, Christophe Brun, Didier Gasparutto, Xavier Baillin, and Raluca Tiron . DNA Origami Mask for Sub-Ten-Nanometer Lithography. ACS Nano 2016, 10 (7) , 6458-6463. https://doi.org/10.1021/acsnano.6b00413
    6. Zhenbo Peng and Haitao Liu . Bottom-up Nanofabrication Using DNA Nanostructures. Chemistry of Materials 2016, 28 (4) , 1012-1021. https://doi.org/10.1021/acs.chemmater.5b04218
    7. Manpreet Kaur, Virender ., Sunita Khatkar, Baljit Singh, Ashwani Kumar, Santosh Kumar Dubey. Recent Advancements in Sensing of Silver ions by Different Host Molecules: An Overview (2018–2023). Journal of Fluorescence 2023, 62 https://doi.org/10.1007/s10895-023-03494-8
    8. Jili Tian, Xianghua Meng, Yang Liu, Jie Cui, Min Li, Kaiguo Fan, Qi Zhang, Huayu Zhang. Controllable Fabrication of Silicon Nanopore Arrays by Two-Step Inductively Coupled Plasma Etching Using Self-Assembled Anodic Aluminum Oxide Mask. ECS Journal of Solid State Science and Technology 2023, 12 (6) , 064003. https://doi.org/10.1149/2162-8777/acde60
    9. Mengmeng Guo, Zhiyuan Qu, Fanyi Min, Zheng Li, Yali Qiao, Yanlin Song. Advanced unconventional techniques for sub‐100 nm nanopatterning. InfoMat 2022, 4 (8) https://doi.org/10.1002/inf2.12323
    10. Peizhong Cong, Enrique P. Blair. Clocked molecular quantum-dot cellular automata circuits tolerate unwanted external electric fields. Journal of Applied Physics 2022, 131 (23) https://doi.org/10.1063/5.0090171
    11. Nishattasnim Liza, Dylan Murphey, Peizhong Cong, David W Beggs, Yuihui Lu, Enrique P Blair. Asymmetric, mixed-valence molecules for spectroscopic readout of quantum-dot cellular automata. Nanotechnology 2022, 33 (11) , 115201. https://doi.org/10.1088/1361-6528/ac40c0
    12. Nathaniel S Green, Phi H Q Pham, Daniel T Crow, Peter J Burke, Michael L Norton. Layered graphene-mica substrates induce melting of DNA origami. Materials Research Express 2018, 5 (4) , 045035. https://doi.org/10.1088/2053-1591/aabcab
    13. Masudur Rahman, David Neff, Nathaniel Green, Michael Norton. DNA Origami Reorganizes upon Interaction with Graphite: Implications for High-Resolution DNA Directed Protein Patterning. Nanomaterials 2016, 6 (11) , 196. https://doi.org/10.3390/nano6110196
    14. Michelle A. Pillers, Marya Lieberman. Embedded silicon carbide “replicas” patterned by rapid thermal processing of DNA origami on silicon. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2016, 34 (6) https://doi.org/10.1116/1.4965726
    15. Yanqing Zhang, Wenya Chu, Qun Zhou, Shuangshuang Li, Na Li, Junwei Zheng. Electrochemical behaviors of polyaniline confined in highly ordered micro-sized SiO2 cavities. Journal of Electroanalytical Chemistry 2016, 775 , 105-109. https://doi.org/10.1016/j.jelechem.2016.05.042
    16. Dong Geun Bae, Ji‐Eun Jeong, Seok Hee Kang, Myunghwan Byun, Dong‐Wook Han, Zhiqun Lin, Han Young Woo, Suck Won Hong. A Nonconventional Approach to Patterned Nanoarrays of DNA Strands for Template‐Assisted Assembly of Polyfluorene Nanowires. Small 2016, 12 (31) , 4254-4263. https://doi.org/10.1002/smll.201601346
    17. Ji-Li Tian, Gui-Gen Wang, Hua-Yu Zhang, Jie-Cai Han. Large-Scale Preparation of Uniform Nanopatterned Silicon Substrates by Inductively Coupled Plasma Etching Using Self-Assembled Anodic Alumina Masks. ECS Journal of Solid State Science and Technology 2016, 5 (6) , P320-P323. https://doi.org/10.1149/2.0061606jss
    18. Alessandro Angelin, Simone Weigel, Ruben Garrecht, Rebecca Meyer, Jens Bauer, Ravi Kapoor Kumar, Michael Hirtz, Christof M. Niemeyer. Multiscale Origami Structures as Interface for Cells. Angewandte Chemie 2015, 127 (52) , 16039-16043. https://doi.org/10.1002/ange.201509772
    19. Alessandro Angelin, Simone Weigel, Ruben Garrecht, Rebecca Meyer, Jens Bauer, Ravi Kapoor Kumar, Michael Hirtz, Christof M. Niemeyer. Multiscale Origami Structures as Interface for Cells. Angewandte Chemie International Edition 2015, 54 (52) , 15813-15817. https://doi.org/10.1002/anie.201509772
    20. Nathaniel S. Green, Michael L. Norton. Interactions of DNA with graphene and sensing applications of graphene field-effect transistor devices: A review. Analytica Chimica Acta 2015, 853 , 127-142. https://doi.org/10.1016/j.aca.2014.10.023
    21. Michelle A. Pillers, Marya Lieberman. Thermal stability of DNA origami on mica. Journal of Vacuum Science & Technology B, Nanotechnology and Microelectronics: Materials, Processing, Measurement, and Phenomena 2014, 32 (4) https://doi.org/10.1116/1.4879417

    Pair your accounts.

    Export articles to Mendeley

    Get article recommendations from ACS based on references in your Mendeley library.

    Pair your accounts.

    Export articles to Mendeley

    Get article recommendations from ACS based on references in your Mendeley library.

    You’ve supercharged your research process with ACS and Mendeley!

    STEP 1:
    Click to create an ACS ID

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    Please note: If you switch to a different device, you may be asked to login again with only your ACS ID.

    MENDELEY PAIRING EXPIRED
    Your Mendeley pairing has expired. Please reconnect